Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Triangular 70 45 95 0.4 0.2 0.8 115 100 130 25 20 30 Tip Specification
Geometry: Rotated (Symmetric) Tip Height (h): 2.5 - 8.0µm Front Angle (FA): 15 ± 2.5º Back Angle (BA): 25 ± 2.5 º Side Angle (SA): 17.5 ± 2.5 º Tip Radius (Nom): 2 nm Tip Radius (Max): 12 nm Tip SetBack (TSB)(Nom): 5 µm Tip Set Back (TSB)(RNG): 3 - 7 µm Cantilever Specification
Material: Silicon Nitride Geometry: Triangular Cantilevers Number: 1 Cantilever Thickness (Nom): 0.65 µm Cantilever Thickness (RNG): 0.6 - 0.7 µm Back Side Coating: Reflective Aluminum
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